| Chamber |
| Input Power |
AC220V±10% 50/60㎐ |
| Communication method |
USB |
| Temperature control |
Automatic temperature control of Preamp and chamber |
| Focus |
Precise control by laser |
| Sample location |
Settlement of location by laser |
| Safety device |
Shutoff of X-ray within 0.5 second of recognizing the door opening during the measurement |
| Dose rate |
1㎕Sv or less |
| Multi-channel analyzer |
| Number of channels |
8K(8192) |
| Temperature control |
Preamp with automatic temperature control |
| Pulse processing |
Rapid processing using micro computer |
| X-Ray Source |
| Tube |
Oil Cooling compact point
Micro Focus(option) |
| High-voltage current |
0~50kV(program control) |
| Tube current |
0~1mA(program control) |
| Target |
W(Mo, Be window option) |
| Collimator |
| Collimator |
Fixed, Option(Automatic, Polycapillary) |
| Size of Fixed type |
Selection among 0.1, 0.2, 0.3, 0.4, 0.1x0.4 mm (other sizes available) |
| Size of Automatic type |
0.1, 0.2, 0.3, 0.4, 0.05x0.4mm |
| Detection System |
| Detector |
Proportional Counter, Pin, SDD |
| Computer System |
| Computer |
IBM Compatible computer |
| Monitor |
21 inch LCD monitor |
| Printer |
Inkjet color printer |
| Measurement of 2D3D and random location |
| 2D |
Measurement of products or planes with a certain interval |
| 3D |
Measurement of coating distribution status of a plane |
| Random location |
Measurement of products with irregular arrangement |
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| Polycapillary |
 |
| Spot Size |
30um / FWHM |
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| X-Y-Z Stage |
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| Activation method |
High speed with flexible adjustment
High precision motor control |
| Location control |
Location control by mouse
Location control by stage control window
Point and shop of the camera screen
2D3D, random location window location control
Location control by program
Y-axis movement control by door open & close |
| Camera System |
| Camera |
Digital CCD color camera |
| Display method |
Overlay on the monitor |
| Ruler |
Display by software |
| Beam |
Display of life-size by software |
| Lamp |
Flexible control of brightness |
| Automatic adjustment |
Automatic adjustment of Beam axis and camera axis |
| Calibration curve |
| Application |
Single-layer, double-layer, alloy thickness and ratio, solution |
| Correction |
Density correction, background correction by recalibration, correction of standard sample |
| Statistical processing |
| Processing items |
Maximum, minimum, scope of fluctuation, average, standard deviation, X-bar charge, range chart, histogram |
| Report |
Five different types of report |
| Number of processing items |
Up to 90 report items |
| Logo |
Insertion of corporate logos including picture and text |
| Preview |
Preview before printout to prevent unnecessary printout |
| Qualitative analysis |
| Display method |
Display of spectrum of element |
| Method |
Qualitative analysis through ROI range method |
| Display of element |
Display of label of designated element |
| Magnify |
A desired portion can be magnified |
| Avg function |
Soft display of spectrum |
| Screen size |
Resizing screen from smallest to the fullest on a continuous basis |
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